Probing the atomic-level structure of LiPON amorphous electrolytes of microbatteries using solid-state NMR

Racha Bayzou – @RBayzou

Amorphous LiPON thin-films are the standard electrolytes for all-solid microbatteries. They are prepared by the radiofrequency sputtering from Li3PO4 targets under a pure N2 atmosphere. In this work, we elucidate the relationships between deposition conditions and local atomic-level structure using 31P, 7Li and 14N solid-state NMR.